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475 serial cross-sectional BSE images of a 7 nm FinFET based SRAM were automatically acquired on an orthogonally arranged FIB–SEM. Plane sliced images (Y sliced images) extracted from the reconstructed 3D data gave structural descriptions of each layer: shapes and arrangements of wirings and contact plugs with crystalline contrast, geometries of bit line, word line, power supply voltage and ground line, top views of gate electrodes and Fins in FinFET transistor. #7nm #FinFET #SRAM #3D #FIBSEM #e
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475 serial cross-sectional BSE images of a 7 nm FinFET based S…
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